Ion Beam Miller

Equipment description

The SM-09010 cross-section polisher contains a specimen chamber evacuated by a turbomolecular pump, an ion beam system, a shielding plate holding system, an X and Y stage drive, and an adjustable specimen stage. To obtain a smooth cross-section of the specimen, the polisher vertically irradiates the specimen covered with a shielding plate with an ion beam that cuts the specimen along the edge of the shielding plate.

Ion accelerating voltage: 2 to 6 kV
Ion beam width (FWHM): 500 µm (at accelerating voltage: 6 kV, specimen: Si)
Polishing speed: 1.3 µm/min or more (at accelerating voltage: 6 kV, specimen : Si)
Maximum specimen size: 11 mm (W) x 9 mm (L) x 2 mm (T)
Specimen movement range: ±3 mm (X-axis) / ±3 mm (Y-axis)
Specimen tilt range: ±50
Gas for polishing: Argon
Pressure gauge: Penning type
Main evacuation pump: Turbo-molecular pump
Instrument dimensions: 380 mm (W) x 520 mm (H) x 570 mm (D)
Mass: 41 kg (approximately)